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An introduction to semiconductor microtechnology /

Morgan, D. V.

An introduction to semiconductor microtechnology / D.V. Morgan, K. Board. - 2nd ed. - Chichester ; New York : J. Wiley, 1990. - xiv, 208 p. : ill. ; 24 cm.

Includes bibliographical references.

0471924784

89070572


Semiconductors--Design and construction.

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