Beni,Gerardo. <br/><br/>
Vacuum mechatronics  [Books]. 
Gerardo Beni, Susan Hackwood... [et al.]. 
 - Boston  Artech House  1990 
 - Pages: 377 
<br/><br/><label>ISBN: </label>0890064563  0.00 
<br/><br/><label>LCCN: </label>90002359 
<br/><br/><label>Subjects--Personal Names: </label><br/>Vacuum technology.
<br/><br/><label>Dewey Class. No.: </label>TJ/940  / VAC