TY  - BOOK
AU  - Till,William C.
AU  - Luxon,James T.
TI  - Integrated circuits: materials, devices, and fabrication 
SN  - 0134690311
PY  - 1982///
CY  - Englewood Cliffs, N.J. : 
PB  - Prentice-Hall, 
KW  - Integrated circuits
KW  - Microelectronics
N1  - Includes bibliographical references and index
ER  -