Luo, Jianfeng. <br/><br/>
Integrated modeling of chemical mechanical planarization for sub-micron IC fabrication :  from particle scale to feature, die and wafer scales /  [Book]. 
Jianfeng Luo, David Dornfeld.  
 - Berlin ;   [London] :   Springer,   2004. 
 - xxiv, 311 p. :  ill. ;  24cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9783540223696 
<br/><br/><label>LCCN: </label>2004109174 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction--Simulation methods.<br/>Integrated circuits--Design and construction.