Morgan, D. V. <br/><br/>
An introduction to semiconductor microtechnology / 
D.V. Morgan, K. Board. 
 - 2nd ed. 
 - Chichester ;   New York :   J. Wiley,   1990. 
 - xiv, 208 p. :   ill. ;   24 cm. 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>0471924784 
<br/><br/><label>LCCN: </label>89070572 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.