TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K
TI  - An introduction to semiconductor microtechnology
SN  - 0471924784
PY  - 1990///
CY  - Chichester ; , New York : 
PB  - J. Wiley, 
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references
ER  -