Morgan, D. V. <br/><br/>
An introduction to semiconductor microtechnology /  [Books]. 
D.V. Morgan, K. Board.  
 - Chichester [West Sussex] ;   New York :   Wiley,   1983. 
 - xii, 167 p. :   ill. ;   23 cm. 
<br/><br/> "A Wiley-Interscience publication."  Includes index. 
<br/><br/>Bibliography: p. 157-158. 
<br/><br/><label>ISBN: </label>0471901482 (pbk) 
<br/><br/><label>LCCN: </label>82024788 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.