TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K
TI  - An introduction to semiconductor microtechnology
SN  - 0471901482 (pbk)
PY  - 1983///
CY  - Chichester [West Sussex] ; , New York : 
PB  - Wiley, 
KW  - Semiconductors
KW  - Design and construction
N1  - "A Wiley-Interscience publication."; Includes index; Bibliography: p. 157-158
ER  -