Hsu, Tai-Ran. <br/><br/>
MEMS and microsystems :  design and manufacture /  [Books]. 
Tai-Ran Hsu.  
 - Boston :   McGraw-Hill,   2002. 
 - xii, 436 p. :   ill. ;   24 cm. 
<br/><br/>Includes bibliographical references (p. 427-431) and index. 
<br/><br/><label>ISBN: </label>0072393912 
<br/><br/><label>LCCN: </label>2001044737 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectronic packaging.<br/>Microelectronics.