TY  - BOOK
AU  - Grovenor,C.
TI  - Microelectronic materials
SN  - 0852742703
PY  - 1989///
CY  - Bristol ; , Philadelphia : 
PB  - A. Hilger, 
KW  - Microelectronics
KW  - Materials
N1  - Includes bibliographical references
UR  - http://www.loc.gov/catdir/enhancements/fy0661/88028415-d.html
ER  -