| 000 | 00978nam a22002777a 4500 | ||
|---|---|---|---|
| 001 | 186350 | ||
| 003 | MOEB | ||
| 005 | 20221223070028.0 | ||
| 008 | 020101s2002 maua g 001 0 eng | ||
| 010 | _a2001044737 | ||
| 020 | _a0072393912 | ||
| 035 | _a(SITECODE)OLD17377 | ||
| 040 | _aInstitut Teknologi Brunei | ||
| 084 | _aTK7874 HSU | ||
| 100 | 1 | _aHsu, Tai-Ran. | |
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign and manufacture / _cTai-Ran Hsu. _h[Books]. |
| 260 |
_aBoston : _bMcGraw-Hill, _c2002. |
||
| 300 |
_axii, 436 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references (p. 427-431) and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicroelectronic packaging. | |
| 650 | 0 | _aMicroelectronics. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/mh021/2001044737.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html |
| 998 | _eBook | ||
| 999 |
_c6334 _d6334 |
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| 911 |
_a1 _badmin admin |
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| 912 |
_a1 _badmin admin |
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