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Integrated modeling of chemical mechanical planarization for sub-micron IC fabrication : from particle scale to feature, die and wafer scales / Jianfeng Luo, David Dornfeld. [Book].
Material type:
TextPublication details: Berlin ; [London] : Springer, 2004. Description: xxiv, 311 p. : ill. ; 24cmISBN: 9783540223696Subject(s): Integrated circuits -- Design and construction -- Simulation methods | Integrated circuits -- Design and constructionOther classification: TK7874 LUO Online resources: Publisher description | Table of contents only
| Item type | Current library | Call number | Status | Notes | Date due | Barcode |
|---|---|---|---|---|---|---|
General Collection
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Universiti Teknologi Brunei Library | TK7874 LUO c.3 (Browse shelf(Opens below)) | Available | Reg. no. 032259_ITB | 830829 | |
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General Collection
|
Universiti Teknologi Brunei Library | TK7874 LUO c.2 (Browse shelf(Opens below)) | Available | Reg. no. 032258_ITB | 830828 | |
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General Collection
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Universiti Teknologi Brunei Library | TK7874 LUO c.1 (Browse shelf(Opens below)) | Available | Reg. no. 032002_ITB | 830592 |
Includes bibliographical references and index.
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