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An introduction to semiconductor microtechnology / D.V. Morgan, K. Board.

By: Morgan, D. VContributor(s): Board, KMaterial type: TextTextPublication details: Chichester ; New York : J. Wiley, 1990. Edition: 2nd edDescription: xiv, 208 p. : ill. ; 24 cmISBN: 0471924784Subject(s): Semiconductors -- Design and constructionOther classification: TK7871.85 MOR
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Includes bibliographical references.

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